Abstract
The spatial distribution of backscattered electrons is studied for an Au target with a new Monte Carlo simulation including the discrete energy loss process. The new model is based on the Mott cross section for elastic scattering and the Vriens cross section for inelastic scattering. Some results are compared with the ones by the old Monte Carlo simulation which is based on the screened Rutherford cross section and the Bethe law. The new model results in a larger peak near the incident point and a more gradual decrease of the background part of the radial distribution. The incident energy dependence of the spatial distribution of backscattered electrons is shown for 0° and 45° incident angles. The calculated spatial distribution of low-loss backscattered electrons indicates the possibility of very high resolution even in the backscattered electron image. The exit angle dependence of the penetration depth of backscattered electrons is also studied with the new simulation.
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