Abstract
A zeolite membrane and polymer membranes were prepared for the enrichment of NF3 waste gas. NF3 is a strong greenhouse gas with a 100 year global warming potential (GWP) of >16,600, and is mostly used in the plasma enhanced chemical vapor deposition (PECVD) process as an etching and cleaning gas. First, dense polymer films using polysulfone, polyimide, AF-1600®, AF-2400®, PDMS (polymethylsiloxane), PTMSP (poly (1-trimethylsilyl-1-propyne)), and PTMSDPA (poly[1-phenyl-2-[p-(trimethylsilyl)phenyl]acetylene]) were prepared, and their N2/NF3 separation performance was studied. High N2/NF3 ideal selectivity was obtained from the polyimide and polysulfone films, but these modules were not attractive for the NF3 enrichment process because of their low N2/NF3 mixture gas selectivity. SAPO-34 membranes were then prepared and applied for the NF3 enrichment process. This membrane exhibited promising separation performance (>200 N2/NF3 selectivity, >6.7 × 10−8 N2 mol/m2/s/Pa) for the NF3 enrichment process. However, in order to deal with a high waste stream volume, it was necessary to greatly increase the membrane area. Potential zeolite membrane frameworks for NF3 enrichment have been proposed through membrane-based system design.
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