Abstract
A piezoelectric microcantilever probe is designed for the scanning probe microscope working in tapping mode, and the dynamic characteristics of the piezoelectric microcantilever probe are tested by experiments. The results indicate that due to the resonance effect, induced voltage and sensitivity of microcantilever are not only associated with force magnitude, but also with the force frequency. When the frequency is close to the first natural frequency 97.04 Hz, the output voltage rapidly increases and reaches a maximum value 62.0 mV. The peak voltage value and its position change as the structure size changes. In dynamic mode, the peak voltage is an order of magnitude higher than that in the static mode, and the dynamic mode is more sensitive. Selecting a reasonable size for the device can help to improve the first-order natural frequency and improve the response speed of piezoelectric microcantilever probe during nanomicro detecting.
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