Abstract
A TFTC (thin film thermocouple) is an advanced thermal sensor that is used for measuring transient temperatures. Because of the TFTC’s high-speed response, the usual calibration instrument and method cannot meet the calibration needs. This article introduces a pulse laser heating method. Dynamic character measurements and system identification are combined. The material of the TFTC is NiCr–NiSi, and the film thickness is 2 μm with a ceramic substrate. The transfer function is derived by means of a least-squares solution. In this method under the assumption of an ideal temperature step, there is no strict requirement on a first-order system and the limit of a pulse laser bandwidth. The calibration method introduced in this article resolves the TFTC dynamic character calibration problem.
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