Study of Spatial Distribution of Piezoelectric Properties of ZnO Films by Acoustic Resonator Spectroscopy

Abstract

Using broadband acoustic resonator spectroscopy, an almost twofold increase in the frequency of optimal excitation of the composite microwave resonator of shear bulk acoustic waves is found when the distance from the substrate to the magnetron axis during the deposition of a ZnO film by magnetron sputtering is changed. The frequency characteristics of the resonator structure are simulated and an explanation of the change in the optimal excitation frequency by the inhomogeneity of the inclination of the ZnO film texture’s axis over the thickness is proposed.