Study of self-actuated screen-printed PZT-cantilevers

Abstract

Usually, resonating cantilevers come from silicon technology and are generally activated with pure bending mode. In this work, we suggest to combine high sensitive cantilever structure with full self-actuated piezoelectric thick-film for high electrical-mechanical coupling. This cantilever is realized through the screen-printing deposition associated with a sacrificial layer. The beam part of the cantilever is composed of a PZT layer between two gold electrodes. Optimum performances of ferroelectric ceramics strongly rely on their composition and microstructure which imply generally the use of mechanical pressure and very high sintering temperature. These conditions are not compatible with the screen-printing process. As already shown with ceramics, addition of eutectic composition Li2CO3-CuO-Bi2O3 or borosilicate glass-frit to PZT powder and application of isostatic pressure, the sintering temperature of cantilevers may be decreased. Screen-printed piezoelectric samples are thus fired at 850°C, 900°C and 950°C. SEM analyses show the densification of the microstructure while increasing the sintering temperature. Electrical and mechanical characterizations are then achieved after poling the self-actuated cantilevers of different dimensions. In addition to the bending mode observed with a vibrometer, we pointed out other resonances related to the piezoelectric properties of the PZT cantilevers. Indeed, the three first orders of “in-plane” 31-longitudinal vibration mode and the first order “out-of-plane” 33-thickness resonance mode are revealed. The resonance frequencies deduced from analytical modeling are linked to the cantilever dimensions and thus confirm the experimental results. The piezoelectric parameters of PZT cantilevers approach those of ceramics. Quality factors of 300 to 400 associated to the unusual 31-longitudinal mode make self-actuated screen-printed PZT cantilevers good candidates for detection in liquid and gaseous media.