Abstract
The radiation-induced reactions of the onium salts in model compound solutions of chemically amplified electron beam (EB) and X-ray resists have been studied by means of nanosecond pulse radiolysis. It is found that the onium salts scavenge electrons and promote the generation of proton adducts. On the basis of experimental results, the reaction mechanisms of the chemically amplified EB and X-ray resists have been estimated. It can be presumed that proton adducts of basepolymers play an important role in acid generation.
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