Abstract
The effect of neutral Ar injection on the plasma parameters is investigated numerically by using a multi-fluid code in this research. Reduction of electron and ion temperature has been observed according to the increment in injected neutral Ar density. The heat flux on the target plate has been also reduced with the increasing of injected neutral Ar density. For Ar: 2.0 × 1018 m−3 injection, electron temperature on the target plate reduced to about 1.5 eV. Increase in electron and ion density has been observed at lower injected Ar density. However, at higher Ar injection, electron density and ion density goes to be saturated. These outcomes indicate that the plasma in the end region approaches towards the plasma detachment state.
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