Abstract
It is shown that the use of carbon ions in Rutherford backscattering (RBS) increases mass and depth resolution. It enables the investigation of multilayer structures where the atom of the surface layer is lighter in mass than that one of the underlaying layer, particularly, Ni–Mo–Al–nGaAs. An interphase interactions in these structures is studied. Preferential segregation of insulars of molybdene is found to occur on the surface due to the annealing at temperatures of 730 to 870 K. The correctness of RBS data interpretation is confirmed by Auger electron spectroscopy (AES). [Russian Text Ignored].
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