Abstract
The relations linking structure, microhardness and adhesion were studied for ion-beam mixed tungsten layers deposited on the surface of high-speed steel. The 45nm thick W layer were mixed with 340keV Kr ions at temperatures ranging from RT up to 450°C. The increase of mixing temperature results in partial crystallization of the layers and the increase of the layer hardness. Substantial increase of layer adhesion has been observed in scratch tests for all mixed samples.
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