Abstract
The local topographic and conducting properties of ultra-thin MgO films with polycrystalline Ru and amorphous CoFeB as lower electrodes were investigated. The local conductance and topography of the ultra-thin MgO films (from 0.5 to 1.0 nm) were simultaneously measured with a modified conducting atomic force microscope (CAFM). The imaging force was carefully chosen in order to avoid structural damages in the insulating layers. The promising results include the decrease of the density of hotspots with large conductance with the thickness of MgO and show that an insulating barrier is obtained at 1 nm thickness.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.