Abstract
An embedded layer of metallic clusters of a size of around 10 to 30 A in a ceramic matrix can be produced via ion implantation. We here present some results of the implantation of transition metal ions (Fe, Ni) into AlN. The formation of metallic cluster depends on the chemical nature of the implanted ion and the matrix, while the size of the cluster can be influenced by the number of implanted ions and thermal annealing. Non-destructive techniques like Rutherford Backscattering Spectroscopy (RBS) and Resonant Nuclear Reaction Analysis (RNRA) were used to determine implantation depth profiles. The chemical environment of the implanted ions can be probed using the Extended X-ray Absorption Fine Structure (EXAFS) technique. This method is short-range sensitive and provides nearest neighbor distances and coordination number, through which one can estimate the size of the clusters.
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