Abstract
The ionization region of a hollow-cathode magnetron discharge was studied experimentally. The discharge was powered by either a dc supply or a high-power pulsed supply. The emission spectra of atoms and ions of the target material and buffer gas were recorded in different discharge regions by using an optical probe. The plasma parameters in the dc and pulsed discharges were determined by means of a Langmuir probe. The goal of this research was to find the position of the ionization region and reveal the mechanism of ionization of sputtered target atoms.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
