Abstract
In this study, we analyzed the optical properties of Ai-Si-N coatings applied on silica glass. Under the effect of optical radiation and electron beam, intense luminescence of Al-Si-N films with complex emission spectra is observed. Photoluminescence excited by the radiation with energy of 4.47 eV, which falls within the opaque range of the films, is likely connected with surface luminescence centers. The film luminescence demonstrates that luminescence spectra excited in different ways do not coincide. This indicates that there are different luminescence centers in Al-Si-N films. These centers are excited with different efficiency at different types of excitation.
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