Abstract
Light scattering provides a powerful tool for bare substrate and thin films characterization. Angle-resolved light scattering has been used to quantify the surface roughness of optical components. However, light scattering properties are different between opaque substrate and transparent substrate because angle-resolved light scattering is affected by the contribution of both interfaces of the transparent substrate, it cannot be applied to transparent substrates. The light scattering properties of opaque and transparent substrate were described respectively in this paper and light scattering properties of transparent substrate were analyzed in detail considering of the effects of both interfaces of transparent substrate.
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