Abstract
Ion beam mixing of the Pt/Co bilayers (400Å/700Å) were carried out using 600keV Pt+ ions with fluences ranging from 1×1015ions/cm2 to 1.2×1016ions/cm2 at room temperature. The sputtering of top Pt layer and the diffusion of platinum and cobalt caused by the ion beam at the interface were revealed by RBS. The interface broadening variance for each fluence was extracted from the RBS spectra after subtracting the contribution to broadening variance due to surface roughness as measured by AFM. The linear dependence of interface broadening variance with fluence shows that ion beam mixing is diffusion controlled in Pt/Co bilayers.
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