Abstract
Intensities of Auger lines excited by 5-keV electron bombardment and 1.5-keV Kα x-ray irradiation are compared. The most intensive lines related to LMM or MNN Auger transitions in Fe, Cu, Ag, and Sn metal films are measured with a cylindrical spectrometer with an energy resolution of 0.06%. The effective Auger current is found to depend strongly on the excitation method in the energy region, 0.3–1 keV, studied. The factor τiph/rσi (the ratio of the photoelectric absorption coefficient and the ionization-subshell cross section for an electron impact corrected with respect to the electron backscattering) is found to be proportional to the relative line intensities which can be expected in an Auger spectrum when x-ray irradiation or electron bombardment is considered as an excitation method of the specimen.
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