Study of Imploding Plasma Motion in a Gas-Puff Z-Pinch Plasma as an X-Ray Lithography Source

Abstract

Imploding plasma motion in a gas-puff Z-pinch plasma is studied using both the one-dimensional snowplow model and the energy balance theory. It is shown through use of the energy balance theory that the final plasma radius varies with load conditions, and that the implosion time under the optimum experimental condition agrees with the time yielding the maximum current. The maximum efficiency increases with a decrease in the initial width of an annular gas column, parasitic resistances and parasitic inductances. The use of a large-capacitor bank increases the pinched plasma energy, but decreases the efficiency. We also propose a simple method to estimate the compression enhancement effect by radiation energy losses. Finally, we discuss the optimum experimental condition of this type of X-ray generator for X-ray lithography.