Study of GaN layer crystallization on GaAs(100) using electron cyclotron resonance or glow discharge N2 plasma sources for the nitriding process

Abstract

Two kinds of N2 plasma source, ECR (electron cyclotron resonance) and GDS (glow discharge source) generating mostly N-radical atoms and N-cationic species respectively, were used to grow a thin nitride layer on a GaAs(100) substrate. It was found that this nitridation followed by annealing at 620 °C permits the crystallization of the nitride layer. Pyramidal Zinc Blende GaN nanostructures (zb-GaN) with four facets were obtained using GDS plasma. Surprisingly, a planar and pure wurtzite structure (w-GaN) was obtained using the ECR source. This w-GaN structure shows low photoluminescence intensity and a biaxial tensile strain due to lattice mismatch. Accordingly, the operator can select which phase is formed, simply by switching plasma source. The valence band discontinuity ΔEv has been determined to be 1.74 eV for the zb-GaN/GaAs and w-GaN/GaAs junctions by X-ray photoelectron spectroscopy. As a consequence the conduction bands of the GaAs substrate and the elaborated GaN thin layer are aligned for a zb-GaN/GaAs junction giving efficient electron transport at the zb-GaN/GaAs interface. For w-GaN/GaAs junction, the conduction band discontinuity ΔEc is 0.23 eV inducing an electron confinement in the GaAs(100) which can be an effective way to improve the electronic or optical properties of GaAs devices.