Abstract
In most of the communication devices such as filter, duplexer and oscillator, the need of acoustic resonator is the key part because of their small size and high performances. The design of a resonator based on three layers: (1) Bottom metal electrode such as Pt, Mo, Al and Au etc. (2) Piezoelectric layer such as ZnO, AlN and PZT etc. and (3) Top metal electrode. In this paper, the effects of active area on resonance frequency and impedance response of FBAR device have been studied. The FBAR devices having different membrane sizes, 150×150 µm2, 300×300 µm2, 450×450 µm2 and 600×600 µm2 were designed and simulated using COMSOL software Tool. The variation in resonance frequencies are found to be 2.62-2.65 GHz. Based on simulation results, one of the membrane having size, 300×300 µm2 has been fabricated for FBAR device.
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