Study of defects and thermal stability of ultrathin Cu films on Ta(110) and Ta(100) by thermal helium desorption spectrometry

Abstract

Thermal helium desorption spectrometry has been used to study the interaction of helium with defects in Cu films (5–300 Å) deposited on Ta(110) and Ta(100) single crystals by ultrahigh vacuum electron beam evaporation. The thermal stability of the Cu films was also investigated. Cu films on Ta(110) and Ta(100) at room temperature are metastable and on heating, the films transform into islands. The temperature at which this takes place is strongly dependent on the Cu film thickness and for a given thickness (> 40 Å) occurs at a lower temperature on Ta(100) than on Ta(110). The activation energy for island formation is 1.6 ± 0.4 eV for 50 Å Cu/Ta(110) and 0.8 ± 0.1 eV for 100 Å Cu/Ta(100) obtained by Kissinger analysis. The geometry of the Cu islands resulting from annealing 50 Å Cu films at 1000 K for 10 s depends strongly on the Ta substrate orientation. There is evidence for the stressed states of both the Cu films and the Ta substrates. Helium release from monovacancies and vacancy clusters in Cu films (> 75 Å) on Ta(110) and Ta(100) was detected at ~ 750 K and ~ 800–1000 K respectively. The sublimation of the Cu films from the Ta substrates could be observed by the release of retained helium at ~ 1300 K.