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Abstract
We irradiated soft X-ray laser pulses onto aluminum film targets, which were evaporated on silicon and lithium fluoride substrates. After laser irradiation, we observed irradiated surfaces and confirmed damage with nanometer scale-modified structures. These damage structures were the same as those formed on the aluminum bulk surface. In this article, we discuss a possibility of the growth process of damage structures on the Al surface based on the experimental results.
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