Abstract

Co nanoparticles with an average diameter of 4.8 nm and a very narrow sizedistribution were prepared in a self-built gas aggregation cluster source without asize-selective filtering system. Ferromagnetic nanoparticle films with a thicknessof several hundreds of nanometres were prepared at deposition rates up to600 nm min − 1. Cluster properties and deposition characteristics were investigated for different depositionparameters. The as-deposited films exhibit high porosity compared to conventionallyDC-sputtered films.

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