Abstract
Effects of clusters on film condensation of molecular beam of gas and metal vapors were studied experimentally. Molecular cluster beams of CO2, titanium and indium vapors made by an electron beam gun are condensed on the surface of a quartz plate of film thickness meter. With the TOF method using two choppers, clusters are selected in size depending on the difference of flight time of molecules. Results show that the molecular beams including clusters (dimers) tend to enhance the growth rate of film thickness, that is, clusters have higher sticking probabilities than monomers.
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