Abstract
The deviations of ideality, such as shifts or distortions, in the Capacitance-Voltage (C-V) curve were examined to characterize charges in fluorinated polyimide film in MPOS ( Cu -fluorinated polyimide film- SiO 2 -Si ) test structure. It was observed that charges in fluorinated polyimide film hard baked at 325°C and annealed at 425°C were mobile and positive charged. The mobile charge concentration was 1011/ cm 2 and the activation energy of the drift of positive mobile charge was 0.6 V.
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