Abstract
Temperature changes of micro-optical elements can be expected in applications such as telecommunication and laser machining. We present a comparative study of diffractive gratings fabricated in benzocyclobutene (BCB) and in a conventional photoresist under the influence of elevated temperature. We measured variations in both optical diffraction efficiency and topography by heating the samples to 300 degrees C in air in a specially built oven. Our main findings show that gratings fabricated in BCB exhibit small changes, both optically and topographically, during the first 45 min, whereas the conventional photoresist gratings change drastically within just a few minutes.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
