Study of a positive bevel angle edge termination for high voltage power structures

S Hidalgo,I Obieta,D Flores,J Millan,I Mazarredo

doi:10.1109/smicnd.2002.1105845

Study of a positive bevel angle edge termination for high voltage power structures

S Hidalgo, I Obieta + Show 3 more

https://doi.org/10.1109/smicnd.2002.1105845

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Publication Date: Dec 16, 2002

Affiliation: Centro Nacional de Microelectrónica, Institut de Microelectrònica de Barcelona, Autonomous University of Barcelona

#Technological Parameters #2D Simulations + Show 8 more

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Abstract

This paper provides an extensive analysis of power diodes with a MESA structure edge termination as a function of the main geometrical and technological parameters. The effect of the fixed charge density inherent in the MESA groove filling material is also considered. 2D simulations have been carried out to show the dependence on each parameter and to determine the location of the breakdown point. Fagor commercial MESA power diodes have been used to corroborate the optimisation of the voltage capability.

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