Study of a novel pressure sensor based on optical microring resonator

Abstract

We propose a novel pressure sensor based on the combination of the ring resonator with two straight waveguides and a two-end fixed beam. The principle of this device is acquiring the system static pressure by monitoring the changes in the transmission wavelength shift of the ring resonator with double waveguides. The numerical results show that the sensitivity of the system is up to 49.3 pm/kPa while the pressure range is 0-300 kPa. The thickness of the fixed beam is an important factor which impacts the sensitivity of the system. This device can provide support for fabricating high sensitivity and low cost micro pressure sensors.