Abstract
A method is proposed for determining the density of the ionizing electron component in a dc magnetron discharge in the region where the magnetic field is strong and highly nonuniform. The method is based on the analysis of the measured dependence of the discharge current on the distance between the cathode and the grid anode. The method was used to study the parameters of a magnetron discharge in a process magnetron operating in the regime with a narrow discharge region localized close to the cathode surface.
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