Study and simulation of the growth of solid lubricant MoSe x coatings during pulsed laser deposition

Abstract

The chemical composition and tribological properties of the thin-film diselenide molybdenum coatings deposited by pulsed laser deposition in vacuum and a rarefied inert gas (argon) atmosphere are studied. Upon deposition in a gas at a pressure of ∼2 Pa, stoichiometric coatings with improved antifriction properties as compared vacuum-deposited coatings form. However, a too strong increase in the argon pressure (to ∼10 Pa) degrades the tribological properties of the coating. Structure formation in the MoSe x coatings grown by pulsed laser deposition on an unheated substrate is investigated. Deposition in vacuum or argon at a pressure of 2 Pa leads to formation of rather smooth coatings with a dense amorphous structure containing molybdenum nanoinclusions. Deposition at a high argon pressure results in a developed surface relief and a loose coating structure. A mathematical model is developed using the kinetic Monte Carlo method in order to describe structure formation in the coatings that grow during physical deposition of an atomic flux. A comparative analysis demonstrates satisfactory agreement between the simulated and experimentally studied structures in the coatings created by pulsed laser deposition at various gas pressures.