Study and fabrication of 5.0-inch integrated light guide plate with high uniformity

Abstract

The integrated light guide plate (ILGP) is expected to integrate the functions of multiple optical films in the backlight module (BLM), so that the BLM has excellent properties such as thinness and high light energy utilization efficiency. Aiming at the difficulties in fabrication of the ILGP sample with high uniformity, such as small size and micro-nano structure with limited surface type, in this paper, a grayscale direct-write lithography system for fabricating two-dimensional distributed microprism arrays on the bottom surface of a ILGP is proposed, and a 5.0-inch ILGP with thinness and high uniformity is designed and fabricated. According to the restriction of lithography process technology, a 5.0-inch integrated BLM with two-dimensional distributed microprism arrays on the bottom surface is designed and optimized, of which the illuminance uniformity and luminance uniformity are equivalent to those in typical one. The sample of the optimized 5.0-inch ILGP is fabricated by using the constructed grayscale direct-write lithography system, which successfully solves the difficulties in fabrication of microprism arrays with two-dimensional distribution and asymmetric special surface type. The comparison test shows that the illluminance uniformity and luminance uniformity of the sample are equivalent to that of the typical structure, and a 5.0-inch ILGP sample with thin thickness and high uniformity is successfully produced. At the same time, the grayscale direct-write lithography system created in this paper has a strong ability to process three-dimensional micro-nano structure, which can be further extended to be applied to process other micro-nano components with two-dimensional random distribution and three-dimensional contour.