Studies on gas breakdown in pulsed radio frequency atmospheric pressure glow discharges

Abstract

In pulsed RF atmospheric pressure glow discharges, the gas breakdown judged by the rapid drop in the amplitude of the pulsed RF voltage is no longer universally true. The steep increment of the plasma-absorbed RF power is proposed to determine the gas breakdown. The averaged plasma-absorbed RF power over a pulse period is used to evaluate effects of the preceding pulsed RF discharge on the breakdown voltage of the following one, finding that the breakdown voltage decreases with the increment in the averaged plasma-absorbed RF power under constant pulse duty ratio. Effects of the pulse off-time on the breakdown voltage and the breakdown delay time are also studied. The obtained dependence of the breakdown voltage on the pulse off-time is indicative of the transitional plasma diffusion processes in the afterglow. The breakdown voltage varies rapidly as the plasma diffuses fast in the region of moderate pulse off-time. The contribution of nitrogen atom recombination at the alumina surface is demonstrated in the prolonged memory effect on the breakdown delay time vs. the pulse off-time and experimentally validated by introducing a trace amount of nitrogen into argon at short and long pulse off-times.