Abstract
Cuprous oxide (Cu2O) thin films are prepared on corning glass substrates by metallic sputtering of copper under an oxygen atmosphere. The flow rate of oxygen is varied from 4 SCCM to 7 SCCM and the properties of as-deposited films are reported in this work. The structural, phase confirmation, morphology, elemental composition, bonding, and optical characteristics of Cu2O thin films is studied using various characterization tools such as X-ray Diffraction (XRD), Raman Spectroscopy, Scanning Electron Microscopy (SEM), Energy Dispersive X-Ray Analysis (EDAX), X-ray photoelectron spectroscopy (XPS), Atomic Force Microscopy (AFM) and UV–Visible Spectrometer. It is perceived that the flow rate plays a vital role in obtaining the single-phase Cu2O thin films. The bandgap of the deposited thin films is measured and is in the range of 2.29–2.37 eV, making it suitable for thin-film solar cell applications.
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