Abstract
Thermionic Vacuum Arc (TVA) is a new type plasma source and generates pure, gas and macroparticle‐free plasma. We generated silver and alumina TVA discharges and we investigated their emission properties. The deposited Ag and Al2O3 layers were imaged using Scanning Electron Microscope (SEM) and analyzed using Energy dispersive X‐ray spectroscopy (EDX).
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