Abstract

Thermionic Vacuum Arc (TVA) is a new type plasma source and generates pure, gas and macroparticle‐free plasma. We generated silver and alumina TVA discharges and we investigated their emission properties. The deposited Ag and Al2O3 layers were imaged using Scanning Electron Microscope (SEM) and analyzed using Energy dispersive X‐ray spectroscopy (EDX).

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call