Abstract

Structural features of HFCVD nanocrystalline diamond films have been considered and a physicomathematical model of the atomic structure of its surface has been constructed. The film has been studied in air using a scanning tunneling microscope with a tip of a boron-doped semiconducting diamond single crystal. Fractal analysis of images of the film surface from scanning tunneling microscope has shown the presence of diamond single crystals of different orientations having a mean size of 31 nm with a fractal dimensionality of 2.36 and 2.73.

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