Abstract
Developing quality hydrogen sensitive material is the core problem of hydrogen sensor, the sensor performance was determined by sensitive response, reproducibility and recovery of hydrogen material. Palladium silver alloy was used as hydrogen sensitive material in this paper. A thin film hydrogen sensor was prepared by using magnetron sputtering system. Testing results indicate that the sensor has a good linear output performance at 0 ~ 30% hydrogen concentration range, and demonstrates a high responsiveness and good repeatability. The strength of responsive signal of the sensor decreases while temperature increases, and its responsive time was shorten as the temperature increases.
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