Abstract
Using thermal were mapping and imaging techniques in conjunction with X-ray transmission topography and transmission electron microscopy, precipitation behavior of various fast and slowly diffusing metallic impurities such as Cu, Ni, Al, Zn, Fe, Mo and W in Czochralski Si following rapid thermal processing are investigated. Our data have shown that thermal wave signal is quite sensitive to certain types of metal-induced surface defects (most likely metal silicides). In addition, the comparison between thermal wave and X-ray imaging methods shows an interesting species-dependent relationship.
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