Abstract
High temperature superconducting thin films have been studied by transmission electron microscopy. Observations showed many superconducting and non-superconducting particles formed on the YBa 2Cu 3O 7 (YBCO) thin films synthesized by pulsed laser deposition, which increased the surface microwave resistance of the film. However, if the deposition conditions are selected properly, epitaxial single crystalline YBCO films can be obtained. The effect of resputtering deviates the deposited film from stoichiometric composition for the DC magnetron sputtering. An off-axis sputtering configuration can compensate this shortcoming. The low T c (∼98K) Tl 2Ba 2CaCu 2O 8 films showed many defects, but if the post annealing procedure is performed carefully, good quality Tl-2212 thin films can be obtained.
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