Abstract

Monte Carlo (MC) data, obtained during simulation of an annealed surface GaN(0001), are compared with those obtained from experiment. It is shown that simulations reproduce the majority of patterns observed in experiments provided that a suitable selection of the simulation parameters is made. MC simulations show the development of the characteristic step patterns that depend on the annealing temperature and the time. The pattern, observed for all processes after a very short evaporation time, consists of rough steps. The long time evolution develops into two different patterns. The first, composed of single curly steps, is typical for lower temperatures. In the second, after a sufficiently long time, the steps merge together creating bunches which, at higher temperature, bend into wavy-like structures.

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