Abstract

Fe and Cu single-layered films and Fe/Cu multilayered films were prepared by an rf-magnetron sputtering method, and the film structures and magnetic properties were investigated. Fe and Cu single-layered films become continuous when their thickness is more than 4 nm for Fe and 10 nm for Cu. The crystal structure of Fe/Cu multilayered films depends on the thickness or continuity of Fe and Cu layers. A Fe 1.6 nm/Cu 2 nm multilayered film has a periodic structure. As the thickness of the Fe layer decreases, the magnetic flux density and coercivity decrease and the magnetostriction constant changes from negative to positive. Uniaxial magnetic anisotropy in the plane of the multilayered Fe/Cu films is observed when the Fe layer is discontinuous, but it is not clearly observed for a continuous Fe film.

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