Abstract
Using the structured diaphragm with a centre boss and four peninsulas (CBP structure), a high sensitivity and high linearity pressure sensor for low pressure ranges was demonstrated. The finite element analysis indicated that the CBP structure could achieve a far better performance than other typical structures for low pressure applications. In accordance with the simulation, the fabricated pressure sensor showed a sensitivity of 21.0 mV/V full-scale output and a nonlinearity error of 0.15% full-scale span in the pressure range of 0–5 kPa. The sensors with the CBP structure are potentially a better choice for measuring low pressures.
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