Abstract
A series of amorphous and single-crystalline LaAlO3 (LAO) thinfilms are fabricated by laser molecular-beam epitaxy technique on Sisubstrates under various conditions of deposition. The structurestability of the LAO films annealed in high temperature and variousambients is studied by x-ray diffraction as well as high-resolutiontransmission electron microscopy. The results show that the epitaxialLAO films have very good stability, and the structures of amorphous LAOthin films depend strongly on the conditions of deposition andpost-annealing. The results reveal that the formation of LAOcomposition during the deposition is very important for the structurestability of LAO thin films.
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