Structure reconfigurable metamaterial plate with MEMS technique for THz wave beam shaping

Abstract

This paper reports a structure reconfigurable metamaterial plate for terahertz (THz) wave beam shaping. The metamaterial plate contains an array of micro split ring resonator that controls the local properties of THz wave transmission or reflection. We add MEMS (micro electro mechanical system) component (movable cantilever) to each resonator to tune its resonance. Therefore by the reconfiguration on the resonator array, it enables beam shaping of THz wave when it propagates through the metamaterial plate. For a preliminary demonstration, we have developed a plate device with reconfigurable zone structures to control the THz wave beam focusing. Simulation was carried out for the device performance evaluation.