Abstract
Thepaperpresents the design of a new micro-hotplate.Useplatinum filament as electrode material, Si and SiO2assubstrate materials.Through the structure optimizing analysis, the micro-hotplate owns the best temperature distribution, when the thickness of Si, the front and rear SiO2are set to 125, 25 and 150 μmrespectively, the width of heating electrode is 50μm and the measuring electrode is withoutinterdigital electrode. The new micro-hotplate is benefit for the improvement of sensitivity and overall performance of the sensor.
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