Abstract

ABSTRACTThe structure of copper-hafnium multilayers has been studied as a function of composition modulation wavelength by x-ray diffraction and EXAFS. Sputter deposited samples were produced with composition modulation wavelengths of 1/2, 5, 7, 10, 14, and 20 close packed planes of each constituent per layer. The structure evolved anisotropically from amorphous to crystalline with increasing composition modulation wavelength, with crystalline order first appearing in the growth direction in the 7 mono-layer sample. Structural coherence in the growth direction was not observed to extend beyond one elemental layer in any sample, and evidence for a disordered interfacial layer was observed by EXAFS for all samples. Small angle x-ray diffraction showed strong composition modulation for all but the 1/2 monolayer sample. The amorphous interface is the result of reaction during deposition similar to the solid state reaction observed in other systems such as nickel-zirconium.

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