Abstract
While electron microscopy and diffraction for decades mainly have been a qualitative tool, there has been an increasing trend over the last years for more quantitative work. This trend applies in particular to convergent beam electron diffraction (CBED) where different methods for the retrieval of quantitative structure information from CBED intensities have been proposed. In our group we have aimed at developing a general and automatic method based on the strong parameter dependencies that govern the complicated two-dimensional (2-D) intensity variations in the CBED-disks particularly in the nonsystematic many-beam case. The method is based on least squares fitting between digitized experimental and computed patterns. The advantage of this method as compared with alternative methods is many turning points in the intensity variations, which should give a high parameter sensitivity, and the fact that non-systematic many-beam effects are particularly sensitive to structure factor phases, which should make the method especially suitable to non-centric crystals.
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