Structure design and experimental investigation of a multi-function stylus profiling system for characterization of engineering surfaces at micro/nano scales

Abstract

A novel multi-function stylus profiling system has been developed for characterizing surface properties at micro/nanometer scales. The multi-function stylus profiling system provides, within one set-up arrangement, measurements of topography, friction, Young’s modulus and hardness of a surface. The measurement is based on point-by-point scanning so that the four measured functions can be correlated in space and in time. It targets an area that is of growing importance to a wide range of technologies where function-orientated surfaces/coatings are in demand. The essential part of the multi-function stylus profiling system is a special sensing probe, which has an electromagnetic force actuator and three precision capacitive sensors for simultaneous measurements of surface height/deformation and friction force between the probe tip and the surface being scanned. The system provides a controllable loading force in a range of 0.05–20 mN. The topography measurement has a maximum range of 20 µm. The scanning area of 100 µm × 100 µm is closed-loop controlled with an accuracy of 1 nm. Design, analysis, and experimental investigation of the multi-function stylus profiling system are carried out. Evaluations are carried out on certain material surfaces to demonstrate the capability of the system.