Abstract
Hafnium films were prepared on the molybdenum substrate at room temperature by ion beam assisted deposition (IBAD) and post-annealing was conducted to know their status under high temperature. The structure and composition of Hf coatings were confirmed by XRD, STEM and EDX, respectively. The adhesion strength between the coating and the substrate was evaluated by a nanoscratch tester. The results show that some dilution occurs at the coating/substrate interface and that Mo combines with Hf to form a HfMo2 alloy after high temperature annealing. The adhesive force of the Hf coating was increased from 120 mN to 160 mN after annealing.
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