Abstract
The report contains the results of the study of structure and properties of coatings based on diamond-like carbon (DLC) containing fluorine atoms deposited from the products of pulsed vacuum cathodic-arc discharge with graphite cathode under the inflow of octafluorocyclobutane into the vacuum chamber. For the coatings deposited, the fluorine content reaches approximately 30 atomic %. The presence of C-F and C-F2 chemical bonds is shown. The morphology of the coatings is characterized by the presence of smooth regions and surface formations with increased content of fluorine chemically bonded to carbon. The hardness and Young’s modulus of the DLC-F coatings are lower in comparison with the undoped DLC coatings deposited under analogous conditions. The DLC-F coatings demonstrate low friction coefficient and high wear resistance in dry friction tests.
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