Structure and tribological properties of MoS x coatings prepared by bipolar DC magnetron sputtering

Abstract

MoS x coatings were prepared by bipolar pulse DC (balanced and unbalanced) magnetron-sputtering systems. Deposition parameters, cathode current density, argon pressure, bias voltage and magnetron sputtering conditions, were varied in order to obtain low friction and wear-resistant coatings. Composition and surface morphology were determined by energy dispersive X-rays and scanning electron microscopy, while the structure was investigated by X-ray diffraction. The friction and wear properties were investigated by fretting tests in ambient air of <10% and 50% relative humidity. On proper selection of the argon pressure and the cathode current density, MoS x coatings characterised by a strong (002) basal plane orientation parallel to the substrate were obtained in a reproducible way. Such coatings deposited under optimised conditions exhibit very good lubricity and high wear-resistance, even in ambient air with a relative humidity of 50%. Conversely, when deposition parameters such as higher argon pressure and larger cathode current density result in the deposition of a MoS x coatings with a needle-like structure and preferential (100) and (110) plane orientations, a lower wear resistance is achieved especially in air of 50% relative humidity. Ion bombardment, achieved by applying a negative voltage bias or unbalanced sputtering conditions, improves the friction and wear performance. Conversely, a positive bias voltage deteriorates the tribological performance of the coatings. Experimental data on the friction and sliding wear resistance for MoS x coatings indicate that the best tribological properties are obtained with low sulfur and featureless MoS x coatings.